首页> 外国专利> HOLDING BODY, CRYSTAL GROWING METHOD, AND CRYSTAL GROWING APPARATUS

HOLDING BODY, CRYSTAL GROWING METHOD, AND CRYSTAL GROWING APPARATUS

机译:保持体,晶体生长方法和晶体生长装置

摘要

A holding body (1) of the present invention is to be used in a solution growth method wherein a crystal is grown on the bottom surface (2B) of a seed crystal (2) by bringing the bottom surface (2B) into contact with a carbon-containing siliicon solution (6) contained in a crucible (5) having an opening (5a) at the upper end thereof. The holding body has: a holding member (3) that holds the seed crystal (2) to a lower surface (3A); the seed crystal (2), which is held to the lower surface (3A) of the holding member (3), has an upper surface larger than the lower surface (3A), and which is composed of silicon carbide; and a suppressing member (8), which is fixed to the side surface (3B) of the holding member (3), and is continuous to the outside of the outer circumference of the seed crystal (2) from the side surface (3B) in a planar view, and which suppresses upward vapor transfer from the solution (6).
机译:本发明的保持体(1)用于溶液生长法,其中通过使底面(2B)与籽晶(2B)接触而在籽晶(2)的底面(2B)上生长晶体。包含在坩埚(5)中的含碳硅溶液(6),在其上端具有开口(5a)。保持体具有:将籽晶(2)保持在下表面(3A)上的保持部件(3);以及保持部件(3)。保持在保持部件(3)的下表面(3A)上的籽晶(2)的上表面大于下表面(3A),并由碳化硅构成。抑制部件(8)固定在保持部件(3)的侧面(3B)上,并且从侧面(3B)到籽晶(2)的外周的外侧连续。在平面图中,其抑制了从溶液(6)向上的蒸气传递。

著录项

  • 公开/公告号WO2013161999A1

    专利类型

  • 公开/公告日2013-10-31

    原文格式PDF

  • 申请/专利权人 KYOCERA CORPORATION;

    申请/专利号WO2013JP62393

  • 发明设计人 MASAKI KATSUAKI;KUBA YUTAKA;DOMOTO CHIAKI;

    申请日2013-04-26

  • 分类号C30B29/36;C30B19/06;

  • 国家 WO

  • 入库时间 2022-08-21 16:29:56

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