METHOD FOR MANUFACTURING A THIN FILM MEMBER HAVING A THICKNESS OF SEVERAL NANO-METERS TO ONE MILLIMETER FOR ACCELERATING LASER-INDUCED IONS, A THIN FILM TARGET USING THE SAME, AND A MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A method for manufacturing a thin film member for accelerating laser-induced ions, a thin film target using the same, and a manufacturing method thereof are provided to accelerate ion from a thin film member by moving only a thin film target on a two-dimensional plane to focus a laser beam multiple times.;CONSTITUTION: A method for manufacturing a thin film member for accelerating laser-induced ions comprises the steps of: preparing a thin film member solution containing thin film materials to be used for accelerating laser-induced ion, forming a thin film member(110) on a base substrate(200) using the thin film member solution, and dipping the base substrate in a delamination solvent to separate the thin film member from the base substrate.;COPYRIGHT KIPO 2013;[Reference numerals] (AA) Thin film member formation; (BB) Thin film member separation; (CC) Thin film target completion