DEVELOPING PROCESSING DEVICE CAPABLE OF PERFORMING MINUTE DEVELOPMENT, A DEVELOPING PROCESSING METHOD, AND A COMPUTER STORAGE DEVICE

摘要

PURPOSE: A developing processing device, a developing processing method, and a computer storage device are provided to reduce line width difference after development by individually performing developing processing for each shot inside a substrate plane.;CONSTITUTION: A substrate support supports a substrate. A gathering nozzle is formed from one end part of the substrate to the other end part of the substrate side by side. A plurality of shafts is installed between supporting members. A driving tool separately horizontally moves each supply nozzle(90). The driving tool comprises a shift function. A rinse liquid discharge port which discharges a rinse liquid to a substrate is formed on the supply nozzle.;COPYRIGHT KIPO 2013