SCANNING PROBE MICROSCOPY HAVING A PROBE WITH NANOPARTICLES AND A CALIBRATION METHOD THEREOF TO IMPROVE RELIABILITY

摘要

PURPOSE: A scanning probe microscopy having a probe with nanoparticles and a calibration method thereof are provided to improve measurement reliability by using a piezolever connected with a Wheastone bridge to precisely define a coefficient of elasticity.;CONSTITUTION: A probe(113) is prepared in a cantilever detector(110). Nanoparticles(113a) are adhered to the end of the probe. A gap between a sample and the probe is made to be uniform by using the nanoparticles in image scanning of the sample. A piezolever(101) is connected with a Wheastone bridge(103) for calculating resistance and determining flexion of the piezolever.;COPYRIGHT KIPO 2013