INGOT GROWING APPARATUS AND AN INGOT GROWING METHOD FOR SMOOTHLY SUPPLYING A SILICON SOURCE WITHIN A CRUCIBLE

摘要

PURPOSE: An ingot growing apparatus and an ingot growing method are provided to block heat radiating from a silicon solution using a shielding member installed at the top of a crucible.;CONSTITUTION: A crucible(104) is installed inside a growth chamber(101). A shielding member(220) is installed on the top of the crucible. The shielding member is placed in a shielding position and a release position. A lifting unit supports the shielding member. The lifting unit converts the shielding member into the shielding position and the release position.;COPYRIGHT KIPO 2013