IMAGING METHOD CAPABLE OF IMAGING A SUBSURFACE STRUCTURE OF AN INDUSTRIAL MATERIAL OF NANO SCALE DEPTH AND AN IMAGING DEVICE, CAPABLE OF BEING UTILIZED FOR A MATERIAL PROPERTY FIELD

摘要

PURPOSE: An imaging method capable of imaging a subsurface structure of an industrial material of nano scale depth and an imaging device are provided to enable to analyze a subsurface structure of an industrial material by an economical and non-destructive method, thereby contributing to a development and the concealment structure detection of a material analyzing system.;CONSTITUTION: An imaging method capable of imaging a subsurface structure of an industrial material of nano scale depth comprises next steps. Incident rays having different frequencies are incident to a material of an analysis object(S1). An object supporting member in which the analysis object is positioned is moved for two-dimensionally scanning along a surface of the object(S5). Images of lights reflected by the object material are obtained(S2). The images of the obtained reflecting lights are two-dimensionally dimensionalized and an analysis result is drawn(S3). Images of a two-dimensional shape of the processed analysis result are output and displayed(S4).;COPYRIGHT KIPO 2013;[Reference numerals] (S1) Injecting incident rays to an analysis object material; (S2) Obtaining images of reflected lights; (S3) Processing the images into two-dimensional images and drawing an analysis resu (S4) Outputting/displaying the processed two-dimensional images; (S5) Moving the analysis object material