SPUTTERING TARGET ASSEMBLY FOR IMPROVING THE EXHAUSTING EFFICIENCY OF A TARGET, CAPABLE OF TOTALLY EXHAUSTING THE TARGET BY TOTALLY EXPOSING THE FRONT SIDE OF THE TARGET

摘要

PURPOSE: A sputtering target assembly for improving the exhausting efficiency of a target is provided to couple the cover of a power supplying device to the upper edge of a backing plate, thereby totally exhausting the target by totally exposing the front side of the target so that the loss of a material is minimized.;CONSTITUTION: A sputtering target assembly comprises a target(110), a backing plate(120), and a cover(130). The target(110) is formed into the shape of a cylinder or a rectangular parallelepiped. The backing plate(120) is formed into the shape of '?? in order to store the target(110). The backing plate(120) is adhered to the target(110) with a metal paste(P) for an easy attachment and detachment. The backing plate(120) is formed with an identical metal material or is formed by mutually coupling with a different kind of metal material. The backing plate(120) includes a cylindrical main body(121) and a lower plate(123). The main body(121) stores the target(110). The lower plate(123) is formed with a different kind of metal material, and is adhered to the lower side of the main body(121) with the metal paste(P). The cover(130) is coupled to the upper edge of the backing plate(120) so that the cover(130) connects the backing plate(120) with a power supplying device.;COPYRIGHT KIPO 2013