PIEZO-DRIVEN STAGE FOR 3-AXIS PLANAR MOTION USING DIFFENTIAL PIEZO FORCES

摘要

PURPOSE: A piezoelectric driving stage for differential power is provided to accurately control 3 axial exercise on a plane by utilizing a piezoelectric element. CONSTITUTION: A piezoelectric driving stage(100) includes a housing(110) fixed to an external device. The housing is formed in various types. The stage includes a movable plate(120) arranged inside the housing. The external device is settled in the movable plate. A hinge unit(130) is arranged between the housing and the movable plate. The hinge unit connects the housing and the movable plate. A piezoelectric element(160) is arranged between the housing and the movable plate. The piezoelectric element includes a first direction piezoelectric element(140).