METHOD FOR MANUFACTURING AN ITO TARGET AND A MANUFACTURED ITO TARGET BY THE SAME, CAPABLE OF REDUCING A MANUFACTURING COST BY REMOVING AN EXTRA PRESSURE DEVICE

摘要

PURPOSE: A method for manufacturing an ITO(Indium Tin Oxide) target and a manufactured ITO target by the same are provided to form a ULPA(Ultra Low Particulate Air) filter with PTFE(polytetrafluoroethylene) material, thereby improving the releasability of a molded article, and reducing a defective rate of sintering.;CONSTITUTION: A method for manufacturing an ITO target comprises: a first step of preparing In2O3 powder and SnO2 powder; a second step of making the In2O3 powder and the SnO2 powder into a slurry(S); and a third step of making the slurry into a molded article by wet pressing. The average grain size of the In2O3 powder and the SnO2 powder is 0.1-3.0 micrometers. The first step includes a process in which the In2O3 powder and the SnO2 powder are agglomerated by heat-treating at a temperature less than the sintering temperature. The second step includes a process in which the In2O3 powder and the SnO2 powder are put in distilled water so that a liquid mixture can be made, and a process in which the liquid mixture is milled. A dispersant of an ammonium-system is added to the distilled water. A binder and an antifoaming agent are further added to the distilled water.;COPYRIGHT KIPO 2013