SURFACE ACOUSTIC WAVE HYDROGEN SENSOR AND A METHOD FOR FABRICATING THE SAME, CAPABLE OF RESOLVING HYDROGEN MOLECULE INTO HYDROGEN IONS

摘要

PURPOSE: A surface acoustic wave hydrogen sensor and a method for fabricating the same are provided to improve the efficiency of a surface acoustic wave hydrogen sensor by forming layers of a hydrogen sensing material on a surface acoustic wave device.;CONSTITUTION: A surface acoustic wave hydrogen sensor comprises a surface acoustic wave device and a nano-particle sensing layer(120). The surface acoustic wave device forms a silicon substrate, an input IDT electrode(113), and an output IDT electrode(114). The upper surface of the silicon substrate is formed with an aluminium nitrate thin film(112). The input IDT electrode and output IDT electrode are formed in both sides of the aluminium nitrate thin film. The nano-particle detecting layer covers the electrode branched finger(115) part of the electrode and is sequentially layered by forming the upper surfaces of the aluminium nitrate thin film and input and output IDT electrodes.;COPYRIGHT KIPO 2013