SMALL PLASMA JET SURFACE PROCESSING DEVICE CAPABLE OF GENERATING PLASMA AT NORMAL PRESSURE BY USING A SMALL PLASMA JET

摘要

PURPOSE: A small plasma jet surface processing device is provided to process a surface of plastics required for micro element manufacture or to apply various substrates of micro elements to an adhesion process through surface processing.;CONSTITUTION: A small plasma jet surface processing device includes a small plasma jet sprayer(1), a power and gas supply unit(2), and a controller(3). The small plasma jet sprayer is includes a small plasma jet spray module to generate plasma in a jet type. The power and gas supply unit is connected with the small plasma jet sprayer to supply power and gas for generating the plasma to the small plasma jet sprayer. The controller controls the injection of the power and gas for operating the small plasma jet sprayer through the power and gas supply unit.;COPYRIGHT KIPO 2013