VACUUM ROLL TO ROLL DEVICE AND A MANUFACTURING METHOD FOR A ROLL TYPE SUBSTRATE FOR ENHANCING A VACUUM DEGREE OF THE VACUUM ROLL TO ROLL DEVICE

摘要

PURPOSE: A vacuum roll to roll device and a manufacturing method for a roll type substrate are provided to minimize the inflow of air into a high vacuum chamber by changing designs of both side of the roll type substrate.;CONSTITUTION: A vacuum roll to roll device comprises a first chamber, a second chamber, shutters(200a,200b), sealing members(300a,300b) attached to the shutters, and a roll type plate(100). The second chamber is adjacent to the first chamber. The shutters are arranged between the first and second chambers. The roll type substrate is moved by the sealing members from the first chamber to the second chamber.;COPYRIGHT KIPO 2013