SUPERCRITICAL DEVICE INCLUDING A HEAT TRANSMISSION PREVENTING UNIT USING LOW MELTING POINT METAL

摘要

PURPOSE: A supercritical device using low melting point metal is provided to prevent the breakdown of a pattern formed on the surface of a substrate by preventing heat from being transmitted to the substrate.;CONSTITUTION: A processing fluid supply unit supplies processing fluid to the inside of a processing container. A heating unit heats the processing fluid to change the processing fluid supplied to the processing container into the processing fluid of a supercritical state. A heat transmission preventing unit prevents heat from being transmitted from the heating unit to the substrate to prevent the evaporation of liquid from the substrate until the processing fluid is supplied to the substrate.;COPYRIGHT KIPO 2013