SLIT NOZZLE USED IN SLIT COATER APPARATUS AND COATING METHOD USING SAME

摘要

PURPOSE: A slit nozzle is provided to spread double layer liquid chemical with different properties on a substrate in short time. CONSTITUTION: A slit nozzle(121) comprises a slit shaped a first outlet(1211) and a slit shaped second outlet(1212). The first outlet of the slit nozzle discharges a first liquid chemical(551). The slit shaped second outlet discharges a second liquid chemical(552). The second liquid chemical is not mixable with the first liquid chemical. The slit nozzle relatively moves with regard to the processed substrate. The first liquid chemical and the second liquid chemical are spread on the surface of the processed substrate. The second outlet is slantly formed toward the first outlet and discharges the second liquid chemical toward the first outlet. The distance between the first outlet and the second outlet is 1Mm-1000mm in a slit nozzle direction.