REFLECTOR BASED HETERODYNE INTERFEROMETER WITH IMPROVED PRECISION AND A SENSOR USING THE SAME

摘要

PURPOSE: A reflector based heterodyne interferometer and a sensor using the same are provided to easily constitute an interferometer by using reflectors.;CONSTITUTION: A reflector based heterodyne interferometer comprises a light source(100), a light splitter(102), reflectors(105,106), and a detecting unit(108). The light source outputs optical signals. The light splitter separates the output optical signals into reflected lights and transmission lights. The reflectors modulate the reflected lights and transmission lights into that of different frequencies, thereby reflecting the same. The detecting unit analyzes the frequency-modulated optical signals.;COPYRIGHT KIPO 2013