FLOW CONTROL DEVICE AND A FLOW MEASURING DEVICE FOR REDUCING THE NUMBER OF COMPONENTS OR A DIAGNOSTIC DEVICE USED FOR THE FLOW CONTROL DEVICE COMPRISING THE FLOW MEASURING DEVICE AND A RECORDING MEDIUM IN WHICH A PROGRAM FOR DIAGNOSIS IS RECORDED

摘要

PURPOSE: A flow control device and a flow measuring device or a diagnostic device used for the flow control device comprising the flow measuring device and a recording medium in which a program for diagnosis is recorded are provided to diagnose the abnormality of the measured value of flow in a way at least as accurate as an existing way by diagnosing the measured value of the flow based on the amount of variation of an input value when a fluid is in a stable state.;CONSTITUTION: A flow measuring instrument measures the flow of fluid flowing in a fluid path. A flow control valve(2) is formed on the fluid path. A valve control part(21) controls the positioning of the flow control valve for the deviation between a measured value of flow and a target value of the flow to be small. A fluid resistance(4) is formed on the fluid path. A pressure sensor(3) is formed at one side between the upper or lower sides of the fluid resistance. A stable state detecting part(5) determines whether the state of the fluid flowing in the fluid path is stable. An abnormality diagnosing part(6) diagnoses the abnormality of the measured value of the flow.;COPYRIGHT KIPO 2013;[Reference numerals] (14) Flow conversion part; (21) Valve control part; (5) Stable state detecting part; (61) Flow variation calculation part; (62) Abnormality determination part; (AA) Opening command;