A VACUUM RECYCLING EQUIPMENT FOR REFINING THE SOLAR GRADE POLY SILICON AND A METHOD FOR REFINING THE SOLAR GRADE POLY SILICON

摘要

PURPOSE: A solar grade polysilicon vacuum circulation refining equipment, and a solar grade polysilicon refining method using the same are provided to reduce time and original cost necessary for manufacturing polysilicon by being able to manufacture polysilicon solution of preset concentration. CONSTITUTION: A solar grade polysilicon vacuum circulation refining equipment comprises a vacuum degassing furnace(1), and a recursion vacuum processing furnace(2). The vacuum degassing furnace comprises a vacuum chamber(11), a silicon cask(12) installed inside of the vacuum chamber, and a inactive gas injecting device(13) installed on the silicon cask. A single nozzle connecting tube(22) of the recursion vacuum processing furnace is inserted in the silicon cask through a combining hole(112) of the vacuum chamber, the combined position of the combining hole and the recursion vacuum processing furnace is sealed, and the injected inactive gas is transferred to the single nozzle connecting tube. The vacuum degassing furnace and the recursion vacuum processing furnace are vacuumed through the first vacuum nozzle(111) of the vacuum chamber and the second vacuum nozzle(21) of the recursion vacuum processing furnace. The degree of vacuum of the vacuum degassing furnace and the recursion vacuum processing furnace are controlled, and the inside of the height of the recursion vacuum processing furnace of liquid silicon solution thereby is controlled.