CONTINUOUS PROCESS AND CONTINUOUS REACTING APPARATUS FOR SYNTHESIZING SEMICONDUCTOR GASES INCLUDING GERMANE OR ARSINE

摘要

PURPOSE: A continuous process and continuous reacting apparatus for synthesizing semiconductor gases are provided to continuously reuse unreacted material continuously, thereby improving production efficiency of germane or arsine and minimizing formation of final by-product.;CONSTITUTION: A continuous process for synthesizing semiconductor gases comprises a step of obtaining separated semiconductor gas including germane or arsine which are formed by reaction of a first reactant including a mixture of a reducing agent-containing solution and an alkali solution containing a germanium compound or arsenic compound, and acid solution, in a first reactor(100); a step of supplying the solution containing unreacted material and/or byproduct into a second reactor(200); a step of controlling the pH of the solution by injecting an alkali solution into the second reactor; a step of oxidizing the unreacted material and/or byproduct by injecting an oxidant; a step of preparing a second reactant by injecting a reducing agent-containing solution; and a step of additionally obtaining semi conductor gas including germane and arsine by supplying the second reactant into the first reactor.;COPYRIGHT KIPO 2013