CLEANING DEVICE OF AN ION SOURCE ELECTRODE CAPABLE OF REMOVING A DEPOSIT OVER A WIDE RANGE OF BOTH ELECTRODES

摘要

PURPOSE: A cleaning device of an ion source electrode is provided to clean both electrodes by glow discharge by generating glow discharge between two electrodes facing with each other consisting of an extraction system.;CONSTITUTION: Cleaning gas(48) is supplied in between two electrodes(11,12) facing with each other of an extraction system(10). A cleaning gas source(42) maintain gas pressure of the electrodes to gas pressure generating glow discharge. An abnormal discharge measurement unit(84) measures the number of abnormal discharge generation between the electrodes. A power supply controller(86) controls increase and decrease of output current(Ig) of a glow discharge power supply(60).;COPYRIGHT KIPO 2013;[Reference numerals] (84) Abnormal discharge measurement unit; (86) Power supply controller; (88) Controller; (AA) Closed