TEMPERATURE COMPENSATION METHOD AND TEMPERATURE AND OSCILLATION CONTROL LOOP SYSTEM OF PARALLEL PLATE ELECTRODE TYPE RESONANCE SENSOR

摘要

PURPOSE: A temperature compensating method and a temperature and resonance control loop system of a parallel plate electrode type resonance sensor are provided to maintain constant amplitude and a resonant frequency by using a single mass structure, ambient electrodes, and a feedback control system. CONSTITUTION: A temperature and resonance control loop system of a parallel plate electrode type resonance sensor(240) comprises a sensor displacement detecting unit(250), a resonance control unit(280), a temperature control unit(270), and a sensor driving input unit(200). The resonance sensor includes a sensor vibrating shaft driving electrode, a sensing electrode, a mass outputting the changed amount of a resonance frequency proportional to the input physical quantity. The sensor displacement detecting unit converts displacement signals output from the sensing electrode into voltage signals. The resonance control unit receives the output of the sensor displacement detecting unit, thereby controlling the amplitude and a phase of the resonance signals. The temperature control unit provides a DC voltage for controlling temperature proportional to the output of the temperature sensor. The sensor driving input unit receives the output voltage of the temperature control unit and the resonance control unit, thereby applying the sensor vibrating shaft driving electrode of the resonance sensor. [Reference numerals] (200) Sensor driving input unit; (210) Driving electrode; (220) Weight; (230) Sensing electrode; (240) Resonance sensor; (250) Sensor displacement detecting unit; (260) Frequency counter; (270) Temperature control unit; (280) Resonance control unit