ROTATIONAL MISALIGNMENT MEASURING DEVICE OF A BONDED SUBSTRATE, A ROTATIONAL MISALIGNMENT MEASURING METHOD OF THE BONDED SUBSTRATE, AND A METHOD FOR MANUFACTURING THE BONDED SUBSTRATE CAPABLE OF ACCURATELY MEASURING FAULT

摘要

PURPOSE: A rotational misalignment measuring device of a bonded substrate, a rotational misalignment measuring method of the bonded substrate, and a method for manufacturing the bonded substrate are provided to accurately control the deviation of a notch position.;CONSTITUTION: A center position deviation acquisition part acquires a center position deviation value. A notch shape acquisition part(200) acquires the topology data of a notch. A notch position deviation output part(210) calculates a notch position from the topology data of the notch. The notch position deviation output part calculates the amount of deviation of the notch position. A rotation deviation output part(220) calculates the amount of rotation deviation between each substrate.;COPYRIGHT KIPO 2013;[Reference numerals] (1) Rotational misalignment measuring device; (2) Center position misalignment measuring device; (200) Notch shape acquisition part; (210) Notch position deviation output part; (220) Rotation deviation output part; (230) I/F part; (240) Control part