METHOD FOR FORMING A PATTERN STRUCTURE HAVING BEEHIVE PATTERNS AND A METHOD FOR FORMING A CAPACITOR

摘要

PURPOSE: A method for forming a pattern structure and a method for forming a capacitor are provided to secure fine apertures with beehive patterns by using a simple process.;CONSTITUTION: A mold layer and a mask layer are formed on a substrate. The mask layer is patterned to form a mask pattern having holes. A buried layer pattern(112) is formed in the holes. A third hole(116) is generated between the buried layer patterns. A spacer(114) is formed at the side wall of the buried layer pattern.;COPYRIGHT KIPO 2013