PROBE ASSEMBLY FOR INSPECTING A POWER SEMICONDUCTOR DEVICE AND AN INSPECTION APPARATUS USING THE SAME, CAPABLE OF FACILITATING AN EARLY ERROR INSPECTION BEFORE THE FINAL INSPECTION

摘要

PURPOSE: A probe assembly for inspecting a power semiconductor device and an inspection apparatus using the same are provided to effectively prevent a temperature rise due to heat generated by a current flow of a probe or a semiconductor device, thereby enabling an accurate measurement.;CONSTITUTION: A probe block(1) is composed of materials which has high thermal conductivity and high electrical conductivity and is combined with a force conductive member(113). A force probe(3) is inserted and fixed to a probe receiving hole which is formed on the probe block. A sense type probe(4) is inserted and fixed to the probe receiving hole which is formed on the probe block. The sense type probe is electrically insulated from the probe block and the force conductive member through an insulating member(5). A cooling medium is inserted into a cooling room(7) through a cooling medium inlet(8), and cools a semiconductor device through an exit(9).;COPYRIGHT KIPO 2013