MANUFACTURING METHOD OF A MOLYBDENUM DISULFIDE NANOSTRUCTURE CAPABLE OF TRANSFERRING A MOLYBDENUM DISULFIDE NANOSTRUCTURE ON A DESIRED SUBSTRATE

摘要

PURPOSE: A manufacturing method of a molybdenum disulfide nanostructure is provided to easily grow the monolayer of molybdenum disulfide using a catalytic substrate and a protective layer.;CONSTITUTION: A manufacturing method of a molybdenum disulfide nanostructure includes the following steps of: forming a molybdenum disulfide nanostructure(20) on a catalytic substrate; annealing the molybdenum disulfide nanostructure; forming a protective layer(30) on the molybdenum disulfide nanostructure; and removing the catalytic substrate. The molybdenum disulfide nanostructure with the protective layer is transferred on a target substrate. The protective layer is removed. The molybdenum disulfide nanostructure is the monolayer of molybdenum disulfide. The catalytic substrate is one or the mixture of Ni, Cu, Fe, and Co. The protective layer is one of poly(methyl methacrylate)(PMMA), photoresist(PR), and electron resist(ER).;COPYRIGHT KIPO 2013