APPARATUS AND A METHOD FOR MANUFACTURING GAS-PHASE NANOPARTICLES USING ELECTRON BEAM CAPABLE OF ADJUSTING THE CONCENTRATION AND SIZE OF NANOPARTICLES

摘要

PURPOSE: An apparatus and a method for manufacturing gas-phase nanoparticles using electron beam are provided to manufacture gas-phase nanoparticles under room temperature and atmospheric pressure.;CONSTITUTION: An apparatus for manufacturing gas-phase nanoparticles includes a precursor generating unit(10) and an electron beam-based treating unit(20). The precursor generating unit generates precursors by working fluid. The electron beam-based treating unit decomposes the vapor of the precursors from the precursor generating unit and forms nanoparticles. The precursor generating unit includes a first flux controller(11) and a precursor generator(12). The precursor generator generates precursors based on the working fluid. The electron beam-based treating unit includes a second flux controller(21), an electron beam reactor(22), and an electron beam irradiator(23). The second flux controller controls the flux of the carrier gas. The electron beam reactor reacts the carrier gas and the precursors. The electron beam irradiator irradiates the electron beam reactor with an electron beam.;COPYRIGHT KIPO 2013;[Reference numerals] (22) Electron beam reactor; (23) Electron beam irradiator; (30) Particle collecting unit; (AA) Working fluid; (BB) Carrier gas