METHOD CAPABLE OF PREVENTING TWIST OF A CARRIER BY FIXING THE CARRIER BY A GAS PRESSURE WHICH PRESSES THE CARRIER ON A JIG

摘要

PURPOSE: A method capable of preventing twist of a carrier by fixing the carrier by a gas pressure is provided to enhance connection between the carrier and a jig by arranging a heat-resisting property sealing layer between the lower surface of the carrier and the opening-formed surface of the jig.;CONSTITUTION: A carrier which has an upper surface and a lower surface which exist in the opposite side of each other is provided(101). A dischargeable jig which is equipped with an opening-formed surface which includes multiple openings is provided(103). One of the upper surface and lower surface of the carrier is arranged and fixed on the opening-formed surface(105). A chamber is pressured by a prescribed pressure which is bigger than a standard atmospheric pressure and the jig which is positioned in the chamber is discharged(107).;COPYRIGHT KIPO 2013;[Reference numerals] (101) Opposite side of each other is provided; (103) Opening-formed surface including multiple openings; (105) Opening-formed surface; (107) Chamber is discharged