METHOD FOR PREPARING TRIS(ALKOXYSILYL)AMINE AND METHOD FOR PREPARING TRISILYLAMINE

摘要

PURPOSE: A method for preparing tris (alkoxysilyl)amine is provided to easily dry and remove lithium halide which is a by-product, and to enable cheap and effective synthesis. CONSTITUTION: A method for preparing tris (alkoxysilyl)amine of chemical formula 2 comprises the step of reacting alkoxy halosilane of chemical formula 1 and lithium nitride at 20-200 deg. C. A method for preparing trisilylamine comprises the steps of: reacting alkoxy halosilane of chemical formula 1 and lithium nitride to prepare tris (alkoxysilyl)amine of chemical formula 2; and reacting a reducing agent with the tris (alkoxysilyl)amine.