SUBSTRATE ADSORPTION APPARATUS FOR A DISPLAY PANEL CAPABLE OF IMPROVING THE SUCTION SUCCESS RATE OF SUBSTRATE

摘要

PURPOSE: A substrate adsorption apparatus is provided to minimize the damage of a substrate by absorbing the impact due to the contact of a suction plate and the substrate.;CONSTITUTION: A support stand (110) is installed in an upper structure. An adsorption plate (120) comprises a hollow part (123), a bottom part (121) and adsorption holes (122). The bottom surface contacts on an adsorption object substrate. The multiple adsorption holes are formed on the bottom surface. A buffering airbag (130) connects the support stand and the edge of mutually facing side of the adsorption plate.;COPYRIGHT KIPO 2013