SURFACE FINISHING APPARATUS USING ELECTRO-BEAM WITH PULSE

摘要

PURPOSE: A surface finishing apparatus using the electronic beam with pulse is provided to have a structure that the electric beam is induced and emitted in a plasma state as the method for scanning the electric beam of scanning portion, and to cause the emitted electric beam to have the fixed pulse, thereby preventing the damage of processing object. CONSTITUTION: A surface finishing apparatus using the electronic beam with pulse includes a work chamber (100), a stage (200), and a scanning module (300). The work chamber has a vacuum condition therein and has the outer appearance. The stage is provided in the work source chamber, and a processing object is seated on the upper surface. The scanning modulation includes a scanning unit (310), a pulse power unit (320), and a focusing unit (330). The scanning unit is applied with power by being provided in the work chamber so as to correspond to the stage, and scans the electric beam to the processing object. The pulse power unit repeats supplying and stopping the power so that the electric beam that is generated in the scanning unit has the fixed period. The focusing unit is located to surround a part of the movement route of electric beam that is scanned from the scanning unit. [Reference numerals] (110) Vacuum pump; (310) Scanning unit; (320) Pulse power unit