PROCESSING APPARATUS AND A METHOD FOR CHECKING A PROCESSING STATE, CAPABLE OF PREVIOUSLY PREVENTING AN ABNORMAL PROCESSING STATE

摘要

PURPOSE: A processing apparatus and a method for checking a processing state are provided to quickly detect an abnormality by checking the processing state based on physical parameter information on a register part.;CONSTITUTION: A plurality of valves are arranged on a plurality of gas supply paths. The valves open or close the gas supply paths. A measuring unit measures a physical parameter of a processing gas. A register part preserves the physical parameter measured by the measuring unit. A control unit (300) determines a processing state based on physical parameter information.;COPYRIGHT KIPO 2013;[Reference numerals] (413) I/O module; (415) I/O board; (441) Maximum register; (443) Minimum register; (48A,58A) Pressure gauge; (501) User interface; (507) Memory medium; (603) Host computer