BATCH TYPE ATOMIC LAYER DEPOSITING APPARATUS AND A CLUSTER TYPE ATOMIC LAYER DEPOSITING APPARATUS INCLUDING THE SAME, CAPABLE OF SIMULTANEOUSLY LOADING AND PROCESSING A PLURALITY OF SUBSTRATES

摘要

PURPOSE: A batch type atomic layer depositing apparatus and a cluster type atomic layer depositing apparatus including the same are provided to improve the convenience of maintenance and repair by separating and repairing a main body.;CONSTITUTION: A boat (100) is detachably combined with a main body (200) to form a chamber. The boat is vertically moved by an elevator system. The main body includes an opened bottom side and is cylindrical. The main body includes an outer main body and an inner main body. An insulation material is filled between the outer main body and the inner main body.;COPYRIGHT KIPO 2013