DEVICE FOR REMANUFACTURING SF6 WITH HIGH EFFICIENCY AND MOBILITY AND METHOD FOR REMANUFACTURING SF6 USING THE SAME

摘要

PURPOSE: A sulfur hexafluoride reproducing device and a manufacturing method are provided to conspicuously improve the field applicability and the portability by minimizing and high efficiently reproducing the sulfur hexafluoride with the high purity. CONSTITUTION: The sulfur hexafluoride reproducing method comprises the following steps: a step storing the source gas which contains sulfur hexafluoride; a step of liquefying the stored source gas; a step vaporizing the liquefied source gas; a step of absorbing the rest impurity except for the sulfur hexafluoride from the gas; and a step of repeating the liquefying, vaporizing, absorbing to the filtered gas after filtering the gas. [Reference numerals] (AA) Storage; (BB) Liquefaction; (CC) Evaporation; (DD) Absorption; (EE) Filtration