PHOTOLITHOGRAPHY DEVICE FOR PRINTED ELECTRONICS COMBINING THE UV CURING TECHNOLOGY AND THE SPIN COATING TECHNOLOGY

摘要

PURPOSE: A photolithography device for printed electronics combining the UV curing technology and the spin coating technology is provided to be able to increase the speed of the process and the convenience by performing spin coating and UV irradiation in one device.;CONSTITUTION: A photolithography device (100) combining the spin coating technology and the UV curing technology comprises an injection apparatus (110) spraying a coating solution on the surface of a predetermined substrate; a UV irradiation apparatus (120) positioned in the upper part of the injection apparatus and irradiating a UV light source on the surface of the substrate coated with the coating solution; and a stand (150) fixing the UV irradiation apparatus by using a predetermined support stand. The UV irradiation apparatus moves on the stand to the up and down direction by using a predetermined movable coupling device. A photolithography device comprises a dispensing pump spraying a coating solution on the surface of a predetermined substrate; a UV irradiation apparatus positioned in the upper part of the dispensing pump and irradiating a UV light source on the surface of the substrate coated with the coating solution; and a stand fixing the UV irradiation apparatus by using a predetermined support stand.;COPYRIGHT KIPO 2013