Fabrication method of catalyst based on the nano-silica to decompose PFC gaseous from semiconductor process, and Catalyst based on the nano-silicate to decompose the PFC manufactured by the same

摘要

the present invention is a semiconductor process in the generation that recalcitrant of perfluorinated compounds (PFC) gases of decomposition performance a catalyst for the semiconductor process perfluoro compound gas decomposition process of the nano-silica as a support to improve production process and thus nano-silica prepared by a semiconductor process relates to a catalyst for the decomposition process of perfluoro compound gas as a support, in ethanol tetraethylorthosilicate (Tetraethyl orthosilicate; TEOS), comprising aqueous ammonia and distilled water added to prepare a solution of nano-silica sol and stirred for 6-8 hours at 20 ~ 30 (step 1); The sol solution of nanosilica on Al (OH) ₃ In the silica sol to precipitate the nano state, the surface of nano-silica sol state to the nano-filtration and washing of the precipitated silica sol processing step (step 2); After stirring for 1 hour added the distilled water to the washing of the nanosilica sol state, and 60 ~ 200 ~ 400rpm at 80 and then, as a first catalyst Al (OH) ₃ In the first and After reacting for a time, while the second sulfuric acid as a catalyst (H ₂ SO ₄ ) and an input for 1 hour by the addition of gallium (Ga) oxide as a third catalyst After stirring, the temperature was raised to 100 impregnated catalyst to obtain a dry solid content of 24 hours to evaporate water to congestion (step 3); And wherein, while the dried solids injected air from the firing furnace and fired to heat treatment 5-12 hours at 550 ~ 800 preparing a nano-oxide catalyst (step 4); When prepared, including, due to the physical effects of the spherical surface and providing nano-silica may be further promote the efficiency of the PFC gas decomposition, supported catalyst directly to the three types of nano-silica nanoparticles synthesized by the sol state and liver The catalysts are chemically cross-coupling effects in the void there is an advantage to further increase the waste gas decomposition efficiency. ;