Apparatus for Nano-particle Coating, Manufacturing Method of Core-Shell type Nano-particle and Measuring Method of Coating-Thickness Using the Same

摘要

PURPOSE: A nanoparticle coating device capable of controlling coating thickness in real-time during low pressure particle coating, a manufacturing method of core-shell nanoparticle using the same and a measuring method of coating thickness are provided to generate core particles and to coat a core material with a shell material under separated pressures. CONSTITUTION: A nanoparticle coating device(100) comprises a core particle generator(110), a particle coating reactor(120), and a vacuum pump(130). The core particle generator evaporates and condenses the core material and generates spherical core materials. The particle coating reactor coats the core material particle flowed in from the core particle generator with shell materials. The vacuum pump maintains the pressure inside the particle coating reactor as low. The nanoparticle coating device comprises a pressure separating tool(140) between the core particle generator and the particle coating reactor. A manufacturing method of the core-shell nanoparticles comprises the following steps: generating core particles from the core particle generator; and coating the core particle with the shell materials.