STRUCTURE HAVING A MICRO FLUID CHANNEL WHEREIN THE MICRO FLUID CHANNEL IS FORMED ON A WAFER AND FORMED WITH THE UPPER PART COVERED BY A SHEET OF THIN GLASS AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A structure having a micro fluid channel and a manufacturing method thereof are provided to form a fluid channel without increasing the total thickness.;CONSTITUTION: A structure having a micro fluid channel includes a wafer(120) formed with a micro fluid channel which is concavely carved on the silicon surface of the wave by an etching process and a sheet of glass(140) polished to form a continuous surface with the surface of the wafer. The glass is bonded by covering the upper part of the micro channel of the wafer in a vacuum state. The glass is polished to have the continuous surface with the surface of the wafer after a part of the glass is melted by a reflow process inside the fluid channel to a fixed depth.;COPYRIGHT KIPO 2013