micromachining system using excimer laser beam and control method thereof

摘要

micromachining system and a control method is disclosed using an excimer laser according to the present invention. Micromachining system excimer laser oscillator that oscillates laser beam with an excimer laser according to the present invention; The excimer laser beam is oscillated mask block is arranged to be transmitted through a plurality of masks; Measuring block is placed on the bottom of the mask in the mask block measures the output value of the excimer laser beam passed through the mask; Administrator terminal to determine location information of the mask block corresponding to the maximum output value of the measured output value, and outputs a control signal for adjusting the position of the masking block based on the confirmation that the location information; And outputs the control signal based on a control block to control the position of the mask block. Through this, the present invention is to reduce the time of the working process, increase processing efficiency, it is possible to improve the reliability of the system performance.