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FILM MEMBER, FILM TARGET FOR LASER-DRIVEN ION ACCELERATION AND MANUFACTURING METHODS THEREOF

机译:膜成员,激光驱动离子加速的膜靶及其制造方法

摘要

Laser exists , only the position of the thin film member are focusing the target and the laser multiple times film member manufacturing method for laser induced by the cyclotron to the focusing so as to accelerate the ions from the thin film members , the thin film and a method of manufacturing the target is started . The invention provided a solution comprising the steps of: providing a solution containing a thin film member material to be used in laser-induced ion acceleration ; Forming step of forming a thin film member on the base substrate using a solution of the film member ; And wherein the base substrate is immersed in a solvent for peeling the thin film members are formed of a thin film separation step of separating the base substrate from the thin film member, and provides a method for manufacturing the thin film member including a ;
机译:存在激光,仅薄膜元件的位置使目标聚焦,激光多次薄膜元件的制造方法,用于回旋加速器诱导的激光聚焦,以加速来自薄膜元件,薄膜和离子的离子。开始制造靶子的方法。本发明提供了一种溶液,其包括以下步骤:提供一种溶液,该溶液包含用于激光诱导的离子加速的薄膜构件材料;使用薄膜构件的溶液在基础基板上形成薄膜构件的形成步骤;并且其中,将所述基础基板浸入用于剥离所述薄膜构件的溶剂中,通过将所述基础基板与所述薄膜构件分离的薄膜分离步骤形成,并提供一种用于制造所述薄膜构件的方法。

著录项

  • 公开/公告号KR101263327B1

    专利类型

  • 公开/公告日2013-05-16

    原文格式PDF

  • 申请/专利权人

    申请/专利号KR20110042913

  • 申请日2011-05-06

  • 分类号C23C14/34;H05H13/00;

  • 国家 KR

  • 入库时间 2022-08-21 16:25:12

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