ion beam implantation appointed umbilicals local code required equipment connected

摘要

ion beam implanter generating an ion beam moving along an ion beam source and the beam line, the ion workpiece by the beam includes a vacuum chamber or main entrance is arranged so as to intersect the ion beam for ion implantation of the surface of the workpiece. The ion beam implanter is coupled to the main entrance further comprising a workpiece 24. The workpiece support structure for supporting (100). The workpiece support structure includes a chuck (202) including a rotatable pedestal supporting the workpiece (24, 204). Workpiece support structure coupled to the pedestal is coupled to the rotatable with said first rotatable reel stand 262 and a first rotatable reel,, when the stand is to be rotated in the first direction, around the first reel increasing the length of the flexible cord wound on sex and, when the stand is to be rotated in the opposite direction, is that the length of the binary flexible cord wound around the first reel will return the equipment, such as water coolant lines and power conductors to reduce further includes a castle hollow cord.