GAS ANALYSIS APPARATUS USING A MULTI-FREQUENCY, CAPABLE OF EASILY ANALYZING VARIATION INSIDE A CHAMBER

摘要

PURPOSE: A gas analysis apparatus using a multi-frequency is provided to simultaneously radiate frequencies having mutually different bands, thereby uniformly discharging plasma.;CONSTITUTION: A gas analysis apparatus using a multi-frequency includes an auxiliary chamber, a first frequency generating part (120), a second frequency generating part (130), and a spectrum analyzer (140). A gas inside a chamber flows into the auxiliary chamber through an exhaust pipe. The auxiliary chamber converts the gas into plasma. The first frequency generating part applies a first frequency to the auxiliary chamber. The second frequency generating part applies a second frequency to the auxiliary chamber. The spectrum analyzer analyzes a ray from the auxiliary chamber.;COPYRIGHT KIPO 2013