In the array of the high charging rate mirrors, each mirror is coupled across the two deformable spring bar is deformed by the driving unit. Two deformable spring are parallel to each other and, for example, joined to each other by a cross bar. One end of the cross bar has a support is engaged, the other side end thereof is a mirror combination. On the opposite side of the mirror support and the deformable spring bars at least one of the movable drive plate it is coupled across the. Operation of the movable plate is driven to generate a torque in the local part near the connecting portion of the drive plate for example, a deformable spring bar to the deformable spring bar. This torque is, for example, a deformable spring bar is moved downward to its central portion. As a result, the cross bar is moved downward, thereby moving the mirror downward in FIG.
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