APPARATUS FOR SPLITTING A LASER BEAM AND CALIBRATING POWER FOR THE LASER BEAM, CAPABLE OF UTILIZING A WAVE PLATE AND A POLARIZER

摘要

PURPOSE: An apparatus for splitting a laser beam and calibrating power for the laser beam is provided to split the single laser beam into multiple laser beams having identical powers, thereby maintaining a uniform processing quality.;CONSTITUTION: An apparatus (100) for splitting a laser beam and calibrating power for the laser beam includes a splitting part, a first output part, and a second output part. The splitting part has a first wave plate (111), a first polarizer (112), a second polarizer (113), and a first angle adjusting part (115). The first output part has a second wave plate (121), a third polarizer (122), a fourth polarizer (123), and a first power sensor (124). The second output part has a third wave plate (131), a fifth polarizer (132), a sixth polarizer (133), and a second power sensor (134).;COPYRIGHT KIPO 2013