MASS FLOW RATE SENSOR, MASS FLOW CONTROLLER, METHOD OF MEASURING RATE OF GAS FLOW AND METHOD FOR CONTROLLING MASS FLOW

摘要

mass flow rate sensor of the present invention are all based on the fact that all the by-pass function of the Reynolds number of the error the Reynolds number is used to compensate for the error correction function of the by-pass in the ratio of the sensor for the gas. A sensor tube and a bypass tube for dividing the flow sensor, and the bypass ratio of the sensor is equal to the ratio obtained by dividing the total flow rate through the sensor tube to flow through only the sensor. The heating member heats the downstream and upstream portions of the sensor tube, and the circuit is connected to the heating member to generate a voltage based on a difference between the resistance heating element. The voltage is corrected based on the known flow rates of the reference gas, the flow rate through the sensor is a multi-gas correction function and the correction function is based on the Reynolds number and multiplied by the corrected voltage