Substrate for thin-film ferroelectric heterostructures

摘要

The technical solution relates to the field of thin-film ferroelectric heterostructures.; The essence of the technical solution -; Use as a PZT film as an active working layer and as an adhesive underlayer between the substrate and the lower electrode film structure material Pt / PZT / Pt.; Technical result is a reduction in the number of materials used in the construction of thin film ferroelectric heterostructure and, as a consequence, reduction of the structure and simplifying manufacturing operations process devices for its application.