Method for manufacturing integral single-piece spiral of clock element, involves selectively engraving cavity in additional layer to define portion for spiral spring made of material containing silicon, and releasing spiral of substrate

摘要

The method involves providing a substrate comprising a roadbase and a sub-base made of materials containing silicon, and selectively engraving a cavity in the roadbase to define a portion (19) for a ferrule (55 ''') made of material containing silicon. The engraved substrate is attached on the roadbase. Another cavity in an additional layer is selectively engraved to continue the portion of the ferrule and to define another portion for a spiral spring (53''') made of material containing silicon. A spiral (51''') of the substrate is released.