A method and device for dreimdimensional spatially resolved, graphic representation of complete defect information symbolizing means in a massive the crystal body, by means of hard x-radiation

摘要

The invention relates to a method and a device for the three-dimensionally spatially resolved, pictorial representation of complete defect information in solid crystal bodies by means of hard X-ray radiation (31), wherein the crystal bodies (5) have a minimum thickness (D) that depends on the atomic number, containing – a microfocus X-ray tube (2), which provides a direct primary X-ray beam (31) having hard X-ray bremsstrahlung (20) in an energy range from approximately 50 keV to 450 keV, - a crystal body retaining device (9) for retaining the crystal body (5) to be examined, - a detector (7) having a detector recording surface (71), which is arranged at a distance (R₁) from the beam outlet (21) of the microfocus X-ray tube (2), wherein the crystal body (5) is radiographed to produce an X-ray shadow microscopy recording on the detector (7, 71) in order to register the macroscopic defect structure of the crystal body (5), - wherein, in order to produce linear bremsstrahlung interferences capable of being registered on the detector recording surface (71), an aperture (4) is arranged behind the beam outlet (21) of the microfocus X-ray tube (2) and in front of the retained crystal body (5) in order to reduce lateral scattered radiation and to set a beam divergence, wherein the aperture (4) is provided with a hole diameter in the millimeter range, wherein a distance (R₂) between the crystal body (5) and the detector recording surface (71) is set, which distance is approximately twenty times the distance (R₁ - R₂) of the crystal body (5) from the beam outlet (21) of the microfocus X-ray tube (2) and wherein an acceleration voltage (U) and a current (I) of the microfocus X-ray tube (2) can be set by means of an electronic control unit, which produces a beam intensity after the crystal body (5), wherein the intensity of the maximum of the primary X-ray beam (31) is reduced by the absorption of the crystal body (5) by at least 25% relative to the intensity maximum, whereby a ratio between the remaining beam intensity (3) producing the X-ray shadow microscopy recordings and the interference beam intensity can be set, by means of which ratio a registerable contrast image (52', 52'', 52''') of interference lines (6'') and X-ray shadow microscopy recordings within the imaging cone (6’) can be displayed, characterized in that an arranged crystal body retaining device (9) is rotatably supported between the aperture (4) and the detector (7, 71) in the beam path, the drive of which crystal body retaining device is connected to a control unit (14), which rotates the crystal body retaining device (9) in a controlled manner in an angular range between 0 degrees and 360 degrees in sufficiently small discrete steps about the rotational axis (57) of the crystal body retaining device, wherein the evaluation area for creating a visible spatially resolved three-dimensional model (51', 51'', 51''') of the real crystallographic structure and/or a contrast image (52', 52'', 52''') of the complete defect information comprises the control unit (14), at least one memory, and at least a functional unit (60) for evaluating a data set that is connected to a displaying results display unit (15), wherein the resulting X-ray shadow microscopy recording within the imaging cone (6') and the linear bremsstrahlung interferences (6'') of the radiographed crystal body area are synchronously imaged on the detector (7, 71), read out, and stored as a data set in the memory (66) connected to the control unit (14) for further processing in the functional unit (60) for evaluating a data set.