Wire saw for use in manufacture of wafers in semiconductor and photovoltaic industries, includes a wire-break monitoring device which is comprised of two electromagnetically acting coils, for monitoring brakeage of saw wire

摘要

The wire saw (10) includes a wire box (18) which is provided with an endless saw wire (16) that is movable in the longitudinal direction. The movable saw wire passes through the guide grooves (14) of guide rollers (12) formed in the wire box, such that the saw wire is spanned around the wire box in parallel, for several times. The wire saw further includes a wire-break monitoring device (38) comprised of two electromagnetically acting coils (34,36) for monitoring brakeage of saw wire.