首页> 外国专利> Apparatus useful for plasma treatment of bulk materials, comprises evacuable processing chamber, inner tube, vacuum process-device, inlet- and an outlet locking means, vacuum locking-device, transporting device, and plasma device

Apparatus useful for plasma treatment of bulk materials, comprises evacuable processing chamber, inner tube, vacuum process-device, inlet- and an outlet locking means, vacuum locking-device, transporting device, and plasma device

机译:用于对散装物料进行等离子处理的设备,包括可抽空的处理室,内管,真空处理设备,入口和出口锁定装置,真空锁定装置,运输装置和等离子装置

摘要

Apparatus for plasma treatment of bulk materials comprises: an evacuable processing chamber (1) surrounded by an outer shell; an inner tube (2) arranged in the processing chamber; a vacuum process-device to act on the processing chamber and on the inner tube with a vacuum process; an inlet- and an outlet locking means controlled to open and to close towards the external environment of the apparatus and towards the inner tube; a vacuum locking-device; a transporting device for transporting bulk materials through inlet locking means; and a plasma device (3) for generating reactive plasma gas. Apparatus for plasma treatment of bulk materials comprises: an evacuable processing chamber (1) surrounded by an outer shell; an inner tube (2) arranged in the processing chamber; a vacuum process-device to act on the processing chamber and on the inner tube with a vacuum process; an inlet locking means and an outlet locking means, which are controlled to open and to close towards the external environment of the apparatus and towards the inner tube; a vacuum locking- device different from the vacuum process-device, which is designed to apply vacuum lock to the inlet- and the outlet locking means, respectively irrespective of each other; a transporting device designed to transport the bulk materials filled in the inner tube through the inlet locking means in a transporting direction to the outlet-side locking means; and a plasma device (3) for generating a reactive plasma gas and for impinging the inner tube with the plasma gas. An independent claim is also included for plasma treating of the bulk material using the above apparatus, comprising (a) providing the devices of the apparatus, (b) filling the inlet locking means with the bulk materials under the normal pressure of the external environment, (c) loading the process chamber and the inner tube with the process vacuum, (d) loading the inlet locking means with the vacuum lock, (e) opening the inlet locking-means towards the inner tube, (f) filling the bulk material in the inner tube, (g) loading the inner tube with the plasma gas, (h) transporting the bulk material towards the outlet locking-means, (i) applying the vacuum lock to the outlet locking-means, (j) opening the outlet locking-means towards the inner tube, (k) draining the contents of the inner tube into the outlet locking means, (l) closing the outlet locking means towards the inner tube, (m) applying normal pressure on the outlet locking means, and (n) draining the contents present in the outlet locking means.
机译:用于散装材料的等离子体处理的设备包括:被外壳包围的可抽空的处理室(1);设置在处理室内的内管(2)。真空处理装置,通过真空处理作用于处理室和内管。入口和出口锁定装置,其被控制为朝向和向设备的外部环境以及朝向内管打开和关闭。真空锁定装置;用于通过入口锁定装置运输散装物料的运输装置;等离子体装置(3),用于产生反应性等离子体气体。用于散装材料的等离子体处理的设备包括:被外壳包围的可抽空的处理室(1);设置在处理室内的内管(2)。真空处理装置,通过真空处理作用于处理室和内管。入口锁定装置和出口锁定装置,其被控制以朝向设备的外部环境以及朝向内管打开和关闭。一种与真空处理装置不同的真空锁定装置,该真空锁定装置被设计为分别对彼此的入口锁定装置和出口锁定装置施加真空锁定;输送装置,其设计为将填充在内管中的散装物料沿入口方向通过入口锁定装置输送到出口侧锁定装置。等离子装置(3),用于产生反应性等离子气体并用等离子气体冲击内管。还包括独立权利要求,用于使用上述设备对散装物料进行等离子体处理,包括:(a)提供该装置的设备,(b)在外部环境的常压下用散装物料填充入口锁定装置, (c)向过程腔室和内管加载过程真空;(d)向真空装置加载入口锁定装置;(e)向内管打开入口锁定装置;(f)填充散装物料在内管中,(g)向内管中加载等离子气体,(h)将散装物料移向出口锁定装置,(i)将真空锁定器应用于出口锁定装置,(j)打开出口锁定装置是指朝着内管的出口,(k)将内胎的内含物排到出口锁定装置中,(l)将出口锁定装置朝着内管关闭,(m)在出口锁定装置上施加法向压力, (n)排空出口中的物品锁定装置。

著录项

  • 公开/公告号DE102011080295A1

    专利类型

  • 公开/公告日2013-02-07

    原文格式PDF

  • 申请/专利号DE20111080295

  • 发明设计人 BELL GUIDO;

    申请日2011-08-02

  • 分类号B01J19/08;

  • 国家 DE

  • 入库时间 2022-08-21 16:22:21

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