Filter i.e. dead mirror blocking filter, for filtering certain proportions of work light of light beam assembly, has fields arranged next to each other, and lattice arrangement defining and surrounding fields and formed in irregular manner

摘要

The filter (4) has multiple fields arranged next to each other and assigned to light beams (3). The beams are arranged next to each other with light (1) of specific wavelength or determined wavelength range. Each field for the light of specific wavelength or determined wavelength range is transmissive or impervious. A lattice arrangement defines and surrounds the fields, and is formed in an irregular manner. The lattice arrangement includes multiple lattice bars. A stopper is made of metal and inserted into the lattice arrangement. Width of the lattice bars is preferably about 100 micrometer. Independent claims are also included for the following: (1) a projection exposure system for microlithography (2) a method for manufacturing a filter.