Use of a mixture comprising peroxodisulfate and acid for etching element of iron-platinum group and/or copper group of periodic table, preferably gold, platinum, palladium, rhenium, iridium, osmium or ruthenium

摘要

Use of a mixture comprising at least one peroxodisulfate and at least one acid for etching at least one element of the iron-platinum group and/or copper group of the periodic table, is claimed. Independent claims are also included for: (1) the mixture comprising peroxodisulfate and acid; and (2) producing a thin film structural element, comprising providing the above mixture, and etching the iron-platinum group and/or copper group with the mixture.